Nota : Ceci est la version 2010鈥�2011 de l鈥檃nnuaire 茅lectronique. Veuillez mettre 脿 jour l鈥檃nn茅e dans la barre d鈥檃dresse de votre navigateur pour une version plus r茅cente de cette page, ou cliquez聽ici pour consulter l'annuaire la plus r茅cente.
Vue d'ensemble
G茅nie m茅canique : Introduction to microelectromechanical systems (MEMS). Micromachining techniques (thin-film deposition; lithography; etching; bonding). Microscale mechanical behaviour (deformation and fracture; residual stresses; adhesion; experimental techniques). Materials- and process-selection. Process integration. Design of microdevice components to meet specified performance and reliability targets using realistic manufacturing processes.
Terms: This course is not scheduled for the 2010-2011 academic year.
Instructors: There are no professors associated with this course for the 2010-2011 academic year.
- (3-0-6)
- Prerequisite: Instructor's permission.